Kính hiển vi quét laser đồng tiêu OLS5000
With the Olympus LEXT OLS5000 laser scanning confocal microscope, noncontact, nondestructive 3D observations and measurements are easy to produce. Simply by pushing the Start button, users can measure fine shapes at the submicron level. Ease of use is combined with leading-edge features to deliver an acquisition speed four times faster than our previous model. For customers with larger samples, LEXT long working distance objectives and an extended frame option allow the system to accommodate samples as large as 210 mm.
Thông số kỹ thuật:
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Model |
OLS5000-SAF |
OLS5000-SMF |
OLS5000-LAF |
OLS5000-EAF |
OLS5000-EMF |
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Total magnification |
54x - 17,280x |
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Field of view |
16um - 5,120um |
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Measurement principle |
Optical system |
Reflection-type confocal laser scanning laser microscope |
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Reflection-type confocal laser scanning laser-DIC microscope |
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Color |
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Color-DIC |
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Light receiving element |
Laser: Photomultiplier (2ch) |
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Color: CMOS color camera |
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Height measurement |
Display resolution |
0.5nm |
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Dynamic range |
16 bits |
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Repeatability σn-1*1 *2 *6 |
20x: 0.03μm, 50x: 0.012μm, 100x: 0.012μm |
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Accuracy *1 *3 *6 |
0.15+L/100μm (L:Measuring length[mm]) |
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Accuracy for stitched image *1 *4 *6 |
20x: 15+0.5Lμm, 50x: 9+0.5Lμm, 100x: 7+0.5Lμm (L:Stitching length[μm]) |
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Measurement noise |
1nm |
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Width measurement |
Display resolution |
1nm |
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Repeatability 3σn-1 *1 *6 |
20x: 0.05μm, 50x: 0.04μm, 100x: 0.02μm |
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Accuracy *1 *3 *6 |
Measurement value +/- 1.5% |
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Accuracy for stitched image *1 *3 *6 |
20x: 15+0.5Lμm, 50x: 9+0.5Lμm, 100x: 7+0.5Lμm (L:Stitching length[mm]) |
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Maximum number of measuring points in a single measurement |
4096 x 4096 pixel |
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Maximum number of measuring points |
36 Mpixel |
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XY stage configuration |
Length measurement module |
• |
NA |
NA |
• |
NA |
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Operating range |
100 x 100mm Motorized |
100 x 100mm Manual |
300 x 300 mm Motorized |
100 x 100mm Motorized |
100 x 100mm Manual |
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Maximum sample height |
100mm |
30mm |
37mm |
210mm |
140mm |
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Laser light source |
Wavelength |
405nm |
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Maximum output |
0.95 mW |
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Laser class |
Class 2 (IEC60825-1:2007, IEC60825-1:2014) |
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Color light source |
White LED |
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Electrical power |
240 W |
240 W |
278 W |
240 W |
240 W |
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Mass |
Microscope body |
Approx. 31 kg |
Approx. 32 kg |
Approx. 50 kg |
Approx. 43 kg |
Approx. 44 kg |
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Control box |
Approx. 12 kg |
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*1 Guaranteed when used in constant temperature and constant-temperature environment (temperature: 20˚C±1˚C, humidity: 50%±1%) |
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*2 When measured with MPLAPON LEXT series objectives. |
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*3 When measured with dedicated LEXT objective. |
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*4 When measured with dedicated LEXT objective of 20X or higher. |
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*5 Typical value when measured with MPLAPON100XLEXT objective. |
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*6 Guaranteed under Olympus Certificate System. |
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